The MicroSensors and MicroActuators (MSMA) Laboratory is dedicated to advancing the state of the art of microfabrication and nanofabrication technology, with emphasis on new approaches to fabricate devices with characteristic lengths in the micro- to nanoscale from both silicon and non-silicon materials; and demonstrating these devices in multiple application spaces ranging from energy storage, harvesting, and conversion to biomedical structures and devices.
Our group strives to not only create new knowledge in the science and technology of MEMS fabrication and related application spaces, but also to foster the transfer of technology through creation and facilitation of new micro- and nano-enabled commercial products.
