The MicroSensors and MicroActuators (MSMA) Laboratory is dedicated to advancing
the state of the art of microfabrication and nanofabrication technology,
with emphasis on new approaches to fabricate devices with characteristic
lengths in the micro- to nanoscale from both silicon and non-silicon
materials; and demonstrating these devices in multiple application
spaces ranging from energy storage, harvesting, and conversion to
biomedical structures and devices.
Our group strives to not only create new knowledge in the science and
technology of MEMS fabrication and related application spaces, but also
to foster the transfer of technology through creation and facilitation
of new micro- and nano-enabled commercial products.
The MSMA group is a unit member of the Center for MEMS and Microsystems Technologies (CMMT) at the Georgia Institute of Technology.
MSMA group members will attend The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018). Belfast, UK
January 21-25 2018
Dr. Mark Allen named 2017 National Academy of Inventors Fellow.
December 21 2017
MSMA group members will attend Hilton Head and two oral, and one poster, presentations with Dr. Allen as General Chair.
June 5-9 2016
Dr. Mark G. Allen awarded the IEEE Daniel E. Noble Award.
January 2016
The first annual Singh Center User Meeting
October 2015
Check out our Interview with an Alumnus - Swaminathan Rajaraman
April 2013
Melissa and Minsoo presented their work at MEMS 2013 in Taipei, Taiwan.
January 2013
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