The MicroSensors and MicroActuators (MSMA) Laboratory is dedicated to advancing
the state of the art of microfabrication and nanofabrication technology,
with emphasis on new approaches to fabricate devices with characteristic
lengths in the micro- to nanoscale from both silicon and non-silicon
materials; and demonstrating these devices in multiple application
spaces ranging from energy storage, harvesting, and conversion to
biomedical structures and devices.
Our group strives to not only create new knowledge in the science and technology of MEMS fabrication and related application spaces, but also to foster the transfer of technology through creation and facilitation of new micro- and nano-enabled commercial products.
The MSMA group is a unit member of the Center for MEMS and Microsystems Technologies (CMMT) at the Georgia Institute of Technology.
Dr. Mark Allen named 2017 National Academy of Inventors Fellow.
December 21 2017
The first annual Singh Center User Meeting
Check out our Interview with an Alumnus - Swaminathan Rajaraman
Melissa and Minsoo presented their work at MEMS 2013 in Taipei, Taiwan.