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  • SU-8 pillars

    Polymer Microstructures

    Advanced Photolithography

  • Highly-Laminated Cores

    Electroplated Magnetic Cores

    MEMS Passives for Power Supply on a chip

  • Collagen

    Collagen Microfibers

    Microfabrication Technologies

    for Natural Materials

  • Microfabricated Air-Core Inductors

    Air-Core Inductors

    MEMS Passives for Power Supply on a chip

  • Microfabricated Permanent-Magnet Arrays

    Permanent-Magnet Arrays

    Small-Scale Undulators

    for X-Ray Generation

  • Zinc indcutor

    Electroplated Zinc Inductor

    Biodegradable MEMS-based Implants

  • Buried Interconnects

    Silicon Buried Interconnects

    Embedded Power Circuitry

  • Flexible Neuro-Electrodes

    Flexible Neuro-Electrodes

    Neural Recording/Stimulation

  • Silicon Nanoneedles

    Silicon Nanoneedles

    Intracellular Gene Delivery

  • Polymer Microneedles

    Polymer Microneedles

    Transdermal Drug Delivery

  • On-Chip Inductors

    On-Chip Inductors

    DC/DC Power Converters

  • Gas Generator Actuator

    Gas Generator Actuator

    Combustion Devices

  • Microfabricated copper stator

    Microfabricated Stator Windings

    MEMS-Based Power Generators

The MicroSensors and MicroActuators (MSMA) Laboratory is dedicated to advancing the state of the art of microfabrication and nanofabrication technology, with emphasis on new approaches to fabricate devices with characteristic lengths in the micro- to nanoscale from both silicon and non-silicon materials; and demonstrating these devices in multiple application spaces ranging from energy storage, harvesting, and conversion to biomedical structures and devices.

Our group strives to not only create new knowledge in the science and technology of MEMS fabrication and related application spaces, but also to foster the transfer of technology through creation and facilitation of new micro- and nano-enabled commercial products.

The MSMA group is a unit member of the Center for MEMS and Microsystems Technologies (CMMT) at the Georgia Institute of Technology.


  • Y. Li, et al., "A single mask process for the realization of fully-isolated, dual-height MEMS metallic structures separated by narrow gaps," Journal of Micromechanics and Microengineering, Feb. 2018
  • C. Huang, et al., "Model-assisted development of microfabricated 3D Ni(OH)2electrodes with rapid charging capabilities," Journal of Power Sources, Aug. 2017
  • B.S. Klosterhoff, et al., "Wireless Implantable Sensor for Noninvasive, Longitudinal Quantification of Axial Strain Across Rodent Long Bone Defects," ASME. J Biomech Eng., May 2017
  • B.S. Klosterhoff, et al.,"Implantable Sensors for Regenerative Medicine," ASME. J Biomech Eng., July 2016
  • Y. Li, et al., "Thick Multilayered Micromachined Permanent Magnets With Preserved Magnetic Properties," Journal of Microelectromechanical Systems, April 2016