IE Warning
Your browser is out of date!

This website uses the latest web technologies so it requires an up-to-date, fast browser!
Try Firefox or Chrome!
Back to top

MSMA Research Overview

Research projects in the Microsensors and Microactuators Laboratory all share the common thread of modeling, design, fabrication, and testing of micro-scale and nanoscale structures, and/or systems that are enabled by such structures. Some current research thrusts include:

  • Energy storage: The use of microfabricated structures to create batteries of rapid charging capability for consumer, wireless, and autonomous sensor applications;
  • Nanomanufacturing: Exploiting volumetric nanomanufacturing techniques to create materials with significant overall thickness (e.g., mm-scale) comprised of nm-scale multilayers that confer useful electrical, magnetic, or mechanical properties;
  • Electric power conversion: Exploiting microfabrication to realize ultracompact energy converters, based in part on the nanomanufacturing techniques being developed simultaneously;
  • MEMS-based permanent magnets: Creating new approaches to small-scale, spatially-dense magnetic arrays for energy harvesting and custom radiation generation;
  • Dissolvable sensors: Building wireless sensors that can dissolve in the environment in which they are embedded once their function has been completed; enabling applications such as biomedical implants for acute disease states or environmentally-friendly transient sensors;
  • Protein MEMS: Applying microfabrication approaches to natural products such as proteins to create tissues and tissue interfaces to living organisms;
  • Biointerfaces: Constructing interfaces to biosystems for both in-vitro and in-vivo applications, ranging from microneedle-based sensing and drug/vaccine delivery to interfacing with electrogenic cells in culture.
thumbnail

Collagen Microfibers

Advanced Microfabrication

Magnetic Devices

  • Micro Power Converters
  • Magnetic Generators
  • MEMS Resonant Compass

RF Devices

  • Ferroelectric RF Capacitors
  • RF Inductors
  • mm-Wave Antennas

Wireless Sensors

  • HT Chemical Sensors
  • Capacitive Pressure Sensors
  • RF Flow Sensors

Combustion Devices

  • Micro Pulsejets
  • Conductive-Fuel Actuators
  • Gas Generators

Nanostructures

  • Inclined Nanoimprinting
  • Nanojets
  • MEMS for Nanopatterning

BioMEMS

  • MicroElectrode Arrays
  • Implantable Pressure Sensors
  • Microneedles

Actuators

  • Microtweezers
  • Tactile Displays
  • Piezoelectric Actuators

Carbon MEMS

  • Solar Cells
  • Electrets
  • Force sensors

MEMS Devices

  • Acoustic Sensors
  • Magnetic Relays