The Georgia Tech Institute of Electronics and Nanotechnology (IEN) cleanrooms consist of the Marcus Nanotechnology and the Pettit Microelectronics cleanrooms.
The Marcus cleanroom has an innovative combination of traditional inorganic cleanroom space adjacent to a cleanroom designed for research at the interface between life sciences and nanotechnology. It includes 10,000 square feet of semiconductor/MEMS cleanroom space, a fully-equipped mask-making facility, as well as 5,000 square feet of biological cleanroom space, including Biosafety Level 2 bays. Additional space is provided for characterization and metrology, chemical processing, and biotechnology.
The Pettit building houses an 8,500-square-foot cleanroom (75% class 1000, 25% class 10) for advanced device, microstructure and circuit development. It also contains various workstation-based computer-aided design facilities, a fully-equipped simulation and modeling facilities, and several laboratories for metrology and device characterization.
Major pieces of equipment in the IEN cleanrooms include: mask shop, spin coaters, spray coater, mask aligners, E-beam lithography, nano imprinter, nano eNabler, ink jet dispenser, thermal growth tools, LPCVD, PECVD, ECR, ALD, wet etching stations, reactive ion etching, inductively coupled plasma, e-beam evaporation, filament evaporation, RF/DC sputtering, dicing saws, probe stations, scribers, precision polishing and lapping machines, ovens, contact and optical profilometers, ellipsometers, refractometers, optical microscopes, AFM, SEM, EDX, triboindenter, FIB, mass spectrometers, and X-ray tomography. For more information, visit the IEN cleanroom webpage.